Repair and Refurbishing Services

J316 offers repairs and refurbishing on selected used semiconductor parts to meet your requirements. Be it a component repair, part refurbishing, or overhaul, we understand the need for fast and efficient repair that meets lead time, warranty, and testing considerations.
Our repair service offering is always growing. If you do not see the relevant part number under our repair service offering, please inquire with us.

Repairs and refurbishing available for the following models

Repair for popular brands and RF generator and related components such as Advanced Energy, MKS / ENI, Comdel, ASTeX.
  • 13.56/2 MHZ DUAL RF GENERATOR CDX2000
  • 13.56MHZ RF GENERATOR CB300
  • 27MHZ RF GENERATOR DOFBC2-083
  • 27MHZ RF GENERATOR DOFBC2-083
  • 27MHZ RF GENERATOR LVF3527A
  • 2MHZ RF GENERATOR DOFBC2-084
  • 60 MHZ RF GENERATOR LVF3560A
  • AE RFG5500 RF GENERATOR 5KW 3155051-015
  • AMAT RF GENERATOR GHW-25A
  • APEX 1513 RF GENERATOR 3156111-007
  • APEX 1513 RF GENERATOR 3156111-007
  • APEX 1513 RF GENERATOR 3156110-013
  • APEX 1513 RF GENERATOR 3156110-014
  • APEX 1513 RF GENERATOR 3156110-008
  • APEX 1513 RF GENERATOR 3156110-213
  • APEX 1513 RF GENERATOR 3156110-313
  • APEX 1513 RF GENERATOR 3156110-214
  • APEX 1513 RF GENERATOR 3156110-016
  • APEX 1513 RF GENERATOR 3156110-733
  • APEX 1513 RF GENERATOR A3B2A000BA140L011A
  • APEX 1513 RF GENERATOR A3B0A000BA140L011A
  • APEX 1513 RF GENERATOR 3156111-207
  • APEX 3013 RF GENERATOR A3D5K000BA120A131A
  • CV-2000 RF GENERATOR 40.68MHZ CV2000
  • CV-2000 RF GENERATOR 40.68MHZ CV2000
  • GHW-50 GENESIS RF GENERATOR GHW-50A
  • GHW-50 GENESIS RF GENERATOR GHW-50Z
  • HE RF MATCH 0010-26180
  • OVATION 2560SF RF GENERATOR 3150295-011
  • PARAMOUNT 3013 RF GENERATOR 3156320-003
  • PARAMOUNT 3013 RF GENERATOR 3156330-160
  • PARAMOUNT 3013 RF GENERATOR 3156330-261
  • PARAMOUNT 3013 RF GENERATOR 3156330-265
  • PARAMOUNT 6013 RF GENERATOR 3156360-265
  • PLASMA RF GENERATOR SMM 3000
  • RF CONTROLLER ASSY 685-093578-001
  • RF GENERATOR LPG-6ATM1
  • RF GENERATOR 3151800-001
  • RF GENERATOR 853-043759-004
  • RF GENERATOR FOR 2300 KIYO FXT 853-800838-010
  • RF GENERATOR FOR 2300 KIYO FXT 853-043759-218
  • RF GENERATOR FOR 2300 KIYO FXT 853-043759-218
  • RF GENERATOR FOR 2300 KIYO FXT (PARTS) 853-043759-218
  • RF GENERATOR PDX 900-2V W/O REAR BOX WIRINGS 3156024-132
  • RF GENERATOR RF10M WATERCOOLED 7524140011
  • RF GENERATOR TX SERIES TX10-D000-00-1
  • RF GENERATOR RFG500-380KR
  • RF GENERATOR 0190-15594
  • RF GENERATOR C13002
  • RF GENERATOR C18002
  • RF GENERATOR DOFBC2-083
  • RF GENERATOR DOFBC2-083
  • RF GENERATOR EDGE 3013
  • RF GENERATOR RFG 1251
  • RF GENERATOR EDGE 400KHZ
  • RF GENERATOR C5002
  • RF GENERATOR EDGE 60MHZ
  • RF GENERATOR ACG-3B-01
  • RF GENERATOR ACG-6B
  • RF GENERATOR OEM-12B-07
  • RF GENERATOR 3156113-003
  • RF GENERATOR 3156115-002
  • RF GENERATOR RFG3001
  • RF GENERATOR C5002
  • RF GENERATOR 3152603-005
  • RF GENERATOR GHW-12Z
  • RF GENERATOR GHW-25A
  • RF GENERATOR GEW-30A
  • RF GENERATOR GHW-50A
  • RF GENERATOR NOVA-50A-04
  • RF GENERATOR 3156360-262
  • RF GENERATOR 0190-13320
  • RF GENERATOR C13002
  • RF GENERATOR 3152414-401
  • RF GENERATOR 3152420-122
  • RF GENERATOR 3152420-122
  • RF GENERATOR 3152344-100
  • RF GENERATOR 3155168-001
  • RF GENERATOR RFG 2000-2V
  • RF GENERATOR 3156310-020
  • RF GENERATOR 3156330-015
  • RF GENERATOR 3156330-012
  • RF GENERATOR 31550260-663
  • RF GENERATOR 31550260-661
  • RF GENERATOR 31550260-061
  • RF GENERATOR 3156024-141
  • RF GENERATOR 3156043-204
  • RF GENERATOR 3155107-101
  • RF GENERATOR 3155107-102
  • RF GENERATOR B-10513
  • RF GENERATOR B-5002-12054
  • RF GENERATOR B-11002
  • RF GENERATOR CX1250S
  • RF GENERATOR CX1250S
  • RF GENERATOR SPECTRUM 11002
  • RF MATCH ROUTER 0010-37735
  • RF PLASMA MATCHER CONTROLLER AM-1000-MA
  • RFDS 2000-2V RF GENERATOR 3155038-013
  • VHF OVATION 2560SF 3150295-010
  • VHF OVATION 2760 RF GENERATOR 3150292-007
  • VHF OVATION 2760 RF GENERATOR 3150292-007
Repair for popular brands such as Applied Materials (AMAT), Lam Research, Novellus, Varian, Brooks, Kawasaki, Yaskawa, Tokyo Electron, Genmark, NSK, Ebara, Leybold, Kollmorgen
  • 18-SLOTS PXI CHASSIS W/ EMBEDDED CONTROLLER PXIE-8135 PXIE-1075
  • 2 AXIS MOTOR CONTROLLER E11111670
  • 3 AXES ROBOTIC ARM 65AX-089
  • 300MM & 200MM PRODUCER SE ROBOT ARM SET 001-2081-12
  • 300MM NSK VHP ROBOT W/ UPPER & LOWER WING SSB014FN517
  • 300MM TXZ DLI HEATER CONTROLLER MODULE 0090-08137
  • 300MM VHP ROBOT ARM SET 001-1296-09
  • 4 AXIS CASSETTE CONTROLLER G19-10013-00
  • 4 AXIS LOADER CONTROLLER 02-126855-00
  • 5000 CLEANROOM 8” ROBOT 0010-76015
  • 5000 CLEANROOM 8″ ROBOT 0010-76015
  • 5000 CLEANROOM ASSY ROBOT 8” (PARTS ONLY) 0010-13221
  • A3 ROBOT 3NX540B-A302
  • ADAPTIVE PRESSURE CONTROLLER PM-5
  • AMAT DIGITAL PIEZO CONTROLLER E-712K200
  • ASSY 02-028522-00
  • ASSY 02-423402-00
  • ASSY 02-162448-00
  • ASSY 02-257935-00
  • ASSY 02-257935-00
  • ASSY 02-321865-00
  • ASSY 02-253704-00
  • ASSY 02-425998-00
  • ASSY 0010-75533
  • ASSY ROBOT DRIVER UPPER/LOWER W/ A4249-9215HG 0010-70149
  • BB-TECH ISIOC W/INTERLOCK  02-144694-00 & CONTROLLER 27-053659-00 02-145223-00
  • BEAM BLANK CONTROLLER TYP BB 8KV
  • CBA/PL MATCH BOX CONTROLLER W/ CABLE CBA PL M
  • CHILLER CONTROLLER INR-244-110-X41
  • CONTROL CONCEPTS SCR POWER CONTROLLER 0190-46652
  • CONTROL CONCEPTS SCR POWER CONTROLLER 0190-46652
  • CONTROLLER 0190-00312
  • CONTROLLER 0190-05990
  • CONTROLLER 990-0238-222
  • CONTROLLER 660-194234-004
  • CONTROLLER 0190-24282
  • CONTROLLER E11407161
  • CONTROLLER RCM
  • CONTROLLER ASSY 0010-23302
  • CONTROLLER ASSY 0100-00454
  • CONTROLLER ASSY 0100-00486
  • CONTROLLER ASSY MSD261YS2
  • CONTROLLER ASSY 6VC04163
  • CONTROLLER ASSY 6VC04097/6V951254
  • CONTROLLER ASSY 6VC07569
  • CONTROLLER BOX ASSY 0090-B3730
  • CONTROLLER FLEX4 0090-03563
  • CONTROLLER VANGUARD SERIES SPECTRALASER
  • CONTROLLER VANTAGE FLEX 4 0090-02781
  • DPA RF CONTROLLER 0195-15445
  • DRIVER 0190-10118
  • DUAL ARM ROBOT XU-RCM4901R<A>
  • DUAL ARM ROBOT ASSY E11412800
  • DUAL ARM ROBOT W/ CONTROLLER 30D60E-A006 3NS420B-C003
  • DUAL ARM VACUUM ROBOT WTR-ID200A/L110
  • DUAL ARM WAFER TRANSFER ROBOT W/ CONTROLLER ERCR-SS33-B000 XU-RC400M-B03
  • DYNAMIC AUTOMATED SYSTEMS ROB 300 SERIES
  • ECC2 CONTROLLER II03Z-11
  • ECC2 CONTROLLER EC RACK ECC2 CONTROLLER EC RACK
  • ECC2 CONTROLLER EC RACK 3M80-000980-1A
  • ECC2 CONTROLLER EC RACK 3M80-000980-1C
  • ECC2 CONTROLLER MC RACK 2L80-050211-15
  • ECC2 CONTROLLER MC RACK 2L80-050211-15
  • ELECTROSTATIC CHUCK CONTROLLER ECC3-2
  • END EFFECTOR 0190-14750
  • ENDURA PVD CHAMBER DRIVER 0010-20079
  • EPI SYSTEM CONTROLLER 0010-44817
  • ESA SERVO DRIVER ESA-Y3040C23-11
  • ESA SERVO DRIVER ESA-J2006CF3-11
  • EYED CONTROLLER SPECTROGRAPH 0190-28658
  • FARA SRC+ ROBOT CONTROLLER W/ CABLES SRCP-SX5T
  • FLOW CONTROLLER AFC-8000-T2104-052-P-002
  • FT-700W CONTROLLER FTI-700W-T5-031
  • GB4 WAFER HANDLER TRANSFER ROBOT W/ END EFFECTOR GENCOBOT 4/3L
  • GB4 WAFER HANDLER TRANSFER ROBOT W/ END EFFECTOR GENCOBOT 4/2L
  • GENCOBOT 1A AUTOMATION CONTROLLER 4100-0027-01
  • GENCOBOT ROBOT I WAFER HANDLING 4100-0023-029
  • HEATER DRIVER 0190-35875
  • I/O CONTROLLER 27-262408-00
  • INDRADRIVE HCS02 CONTROLLER HCS02.1E-W0070-A-03-NNNN
  • INDRADRIVE HCS02 CONTROLLER HCS02.1E-W0070-A-03-NNNN
  • INUSA OZONE SENSOR CONTROLLER INTERFACE SCI-PLUS
  • KOLLMORGEN MAGNEDYNE MAGNET DRIVER 0190-70060
  • LINEAR MOTOR CONTROLLER 4S061-689-1 CLSR-33-N2CD
  • LOW ENERGY LENS RELAY CONTROLLER E11301560
  • LOWER MATCHBOX CONTROLLER (DC) 810-034802-001 853-480133-001-3999
  • MAG DRIVER 0190-03554
  • MAG.DRIVE DIGITAL CONTROLLER 400035V0011
  • MAIN ROBOT CONTROL CURR-2292-1
  • MATTSON ASPEN ROBOT CONTROLLER WS-908-0008
  • MEGAPULSE MAIN CONTROLLER ASSY A-19596
  • MEI EXMP 0190-39033
  • MEI EXMP 0190-13990
  • MEI EXMP 0190-25777
  • MEI EXMP 0190-39033
  • MIDIVAC ION PUMP CONTROLLER 929-5003
  • MIDIVAC ION PUMP CONTROLLER EX929-5003
  • MODULE CONTROLLER 02-105005-00
  • MONOCHROMATOR ENDPOINT DETECTOR CONTROLLER P/N 1000389 VM3200
  • MOTION CONTROLLER DMM2310
  • MOTOMAN ROBOTIC HANDLING ARM YR-CRJ3-A02
  • MOTOMAN ROBOTIC HANDLING ARM YR-CRJ3-A03
  • MOTOR ASSY 0010-70317
  • MOTOR CONTROLLER ASSY LC4B013002
  • MSC6610 MICRO STATION COMMUNICATION CONTROLLER MSC 6610
  • MTR1 ROBOT VACUTRAN W/O COVER 11501-82
  • MTR5 ROBOT VACUTRAN 5 001-7600-10
  • MTR5 ROBOT VACUTRAN 5 001-7600-10
  • MTR5 ROBOT VACUTRAN 5 W/O SIDE COVER 001-7600-10
  • MW CONTROLLER MWC-01
  • NANOVALVE CONTROLLER 52-504254-012
  • NANOVALVE CONTROLLER 52-504254-200
  • NXC100 ROBOT CONTROLLER ERCR-NS01-B004
  • P1191D LAMP DRIVER DIMMER SCR CONTROL 0190-17464
  • PCB ASSEMBLY 0100-89004
  • PCB PYRO DSP TCG CONTROLLER DISTRIBUTION 0090-03402
  • PCB UI/FIB PRESSURE DISPLAY W/ 810-056663-007 & 50020R-10 810-111093-002
  • PEDASTAL LIFT DRIVER 1080-01809
  • PHASETRONICS P1140 LAMP DRIVER 0190-09560
  • PLATEN HEATER CONTROLLER E17927810
  • PM-5 ADAPTIVE PRESSURE CONTROLLER 641PM-16BC-0002
  • PM-5 ADAPTIVE PRESSURE CONTROLLER 641PM-36PM-1001
  • PM-7 ADAPTIVE PRESSURE CONTROLLER 650PM-16BG-AFN3
  • POWER CUBE 32/900 PW3-32/900
  • POWER CUBE 32/900 PW3-32/900
  • POWER CUBE 32/900 MICROPROCESSOR CONTROLLER INDUCTIVE HEATER PW3-32/900
  • POWER SUPPLY CONTROLLER 3152327-000
  • PROCESS MODULE CONTROLLER PMC-I
  • PVD LAMP/HEATER DRIVER 0190-76273
  • PYRAMID X-SCAN CONTROLLER W/ 0120-01840 0500-00232
  • Q-SWITCH DRIVER HG-111
  • RF GENERATOR DRFS-10SB26
  • RGV/OHT INTERFACE CONTROLLER 11C9822
  • RH ELECTRONICS VACR PRESSURE DISPLAY CONTROLLER 0090-B3130
  • ROBOT ARM LIFTER W/ PROTECTIVE BOX SPPF21A60005
  • ROBOT ARM-2200 ELEVATOR ARM W/ FLEXTRONICS GRIPPER 9700-2971-01
  • ROBOT ARM-2200 ELEVATOR ARM W/ FLEXTRONICS GRIPPER 9700-2971-01
  • ROBOT ASSY 6-0002-0969-SP
  • ROBOT ATR8 DRV 8.3 WAFER TRANSFER 115937
  • ROBOT CONTROL MODULE 101376
  • ROBOT CONTROL TEACH PENDANT SP1 D21142102
  • ROBOT CONTROLLER 79-427872-00
  • ROBOT CONTROLLER ERCJ-CRJ3-B00-CN
  • ROBOT CONTROLLER ESC-212B
  • ROBOT CONTROLLER XU-CN1170A
  • ROBOT CONTROLLER 30C63E-A003
  • ROBOT CONTROLLER 30D61H-A002
  • ROBOT CONTROLLER MP-SEN-B
  • ROBOT CONTROLLER SC81-CE
  • ROBOT CONTROLLER MP-SEN-B
  • ROBOT CONTROLLER MP-SEN-B
  • ROBOT CONTROLLER MP-SEN-B
  • ROBOT CONTROLLER MP-SEN-CE
  • ROBOT CONTROLLER ERCR-RS09-A003
  • ROBOT CONTROLLER ERCR-NS16-A001
  • ROBOT CONTROLLER ERCR-NS00-A004
  • ROBOT CONTROLLER ERCR-NS01-B004-E1
  • ROBOT CONTROLLER ESC-204T-S293
  • ROBOT CONTROLLER RMT POWER W/EXT I/O, AXY
  • ROBOT CONTROLLER (PARTS) 30C63E-A002
  • ROBOT CONTROLLER ASSY 853-192559-100
  • ROBOT CONTROLLER SIGMA 5 AMP 02-408299-00
  • ROBOT FOR VCE5 ELEVATOR 002-0921-20
  • ROBOT SEND ARM BG4-3518
  • ROBOT SERVO MOTOR W/ ASSY M-SSB020FN502
  • ROBOTIC ARM WTR-IP200A/L110
  • ROBOTIC ARM T2DC5-10997
  • ROTATION CONTROLLER 17000891
  • RTP CONTROLLER ASSY 0090-01723
  • SATCON CONTROLLER MAG ROTATION W/NTC 300MM RADI 0190-12925
  • SCR LAMP DRIVER 15 ZONE RADIANCE 0190-17056
  • SCR LAMP DRIVER 15 ZONE RADIANCE 0190-17056
  • SCR POWER CONTROLLER 3096-1007
  • SCR POWER CONTROLLER 2096-1002A
  • SCR POWER CONTROLLER 3096-2016A
  • SCR POWER CONTROLLER 3096-2002
  • SCR POWER CONTROLLER 2096-1009A
  • SCR POWER CONTROLLER 2096-1002
  • SCR POWER CONTROLLER 0190-27295
  • SERVO DRIVER CR10704
  • SERVO DRIVER 0190-63687
  • SERVO DRIVER 300MM ROBOT ELA-B014CFL-03
  • SERVO POSITIONING CONTROLLER M4000
  • SERVO POSITIONING CONTROLLER M4000 25-4033-0000-00
  • SIOC DIGITAL DYNAMICS HDSIOC VECTOR CONTROLLER 02-252395-00
  • SMALL SYSTEM CONTROLLER 9800109151
  • SPIN RINSE DRYER (SRD) CONTROLLER PSC-102
  • SYSTEM CONTROLLER 02-127707-00
  • TEL WAFER TRANSFER ROBOT 2L80-000156-11
  • TEMPERATURE CONTROLLER GR-612-T1
  • TEMPERATURE CONTROLLER MODEL-780
  • TEMPERATURE CONTROLLER 121R-Z/C-T4STD
  • TEMPERATURE CONTROLLER INR-244-647B
  • TEMPERATURE CONTROLLER ASSY (PARTS) 0010-54128
  • THERMO-CON CHILLER CONTROLLER INR-244-110E
  • THROTTLE VALVE CONTROLLER 651D-24942
  • TOKYO ELECTRON H-ARM DUAL ARM WAFER ROBOT HEAD CX80-001366-11
  • TRANSFILL II REFILL CONTROLLER 1491-1014
  • TRUST AUTOMATION C-2030-D01 2 AXIS SPINDLE CONTROLLER W/ C-2027-D01 VECTOR CONTROLLER 02-276537-00
  • TURBO MOLECULAR PUMP CONTROLLER ET600W
  • TURBO PUMP CONTROLLER PT-500M
  • TURBO PUMP CONTROLLER 3930-01149 ACT 1300M / 1600M
  • TURBO-V 301 RACK C.U. CONTROLLER 9699537S004
  • TYPE 1651 THROTTLE VALVE CONTROLLER 1651D2S2
  • VACUTRAN 5 MTR5 TRANSFER ROBOT DRIVE 001-7600-02
  • VACUTRAN 5 VTR5 TRANSFER ROBOT DRIVE W/ARM 001-5500-02
  • VERITY EYED CONTROLLER SPECTROGRAPH 0190-28658
  • VERITY EYED CONTROLLER SPECTROGRAPH SD1024D-2-S
  • VERITY EYED CONTROLLER SPECTROGRAPH SD1024D-2-S
  • VERTICAL ARTICULATED ROBOT W/ TS3100 CNTLR & TP1000-6AX TEACH PENDANT TV1000
  • VICRON 300S WAFER ROBOT W/ PREALIGNER 30870-30000
  • VOLTAGE CONTROLLER 1101861
  • VORTEX CONTROLLER ASSY (PARTS) 853-226824-001
  • VORTEX ROBOT CONTROLLER 02-451436-00
  • VORTEX ROBOT CONTROLLER 02-440121-00
  • WAFER HANDLING ROBOT UTV430
  • WAFER HANDLING ROBOT GB1E
  • WAFER HANDLING ROBOT WFH4CM. TT/LR
  • WAFER HANDLING ROBOT DBM2406-V2
  • WAFER HANDLING ROBOT W/ CONTROLLER LM-ARM-CONT2 SBX92103237
  • WAFER HANDLING ROBOT W/ PRE-ALIGNER CONTROLLER ESC-201B ABM407-1-S-CE-Z1
  • WAFER LOADER W/ ROBOT EXT REACH STEP 99A036-EX
  • WAFER TRANSFER ROBOT XU-RCM6422
  • WAFER TRANSFER ROBOT ATM407B-1-S-CE
  • WAFER TRANSFER ROBOT ATM407B-1-S-CE
  • WAFER TRANSFER ROBOT W/ CONTROLLER GENCOBOT 4/3L
  • WAFER TRANSFER ROBOT W/ PRE-ALIGNER PRE-301B-CE & CONTROLLER ESC-212B ATM407B-1-S-CE
  • WIP CONTROLLER BLOCK 900C0185
  • XP POWER SUPPLY CONTROLLER 0190-14102
  • XP ROBOT CONTROLLER ELC-JG014VF3-01
  • X-SEL CONTROLLER W/ CONNECTING CABLES XSEL-P-3-60I-60I-60IB-DV-E-EEE-0-2-SG
  • YAMATAKE SDU 10 TEMPERATURE CONTROLLER (PARTS) 0190-26463
  • YAMATAKE TEMPERAURE CONTROLLER 0190-26463
Repair for Applied Materials (AMAT) CMP tool components such as MKS / SMC UPA, Kawasaki robot, Sanyo Denki servomotor.
  • KAWASAKI 3NS511C-F003
  • 300MM CMP TITAN HEAD 0205-00898
  • 4-PORT UPA 0190-15840
  • 4-PORT UPA 0190-15840
  • 4-PORT UPA 0190-15840
  • 4-PORT UPA 0190-15840
  • AC SERVOMOTOR P60B18750RXS00M
  • ASSEMBLY 0010-07620
  • ASSY DC POWER SUPPLY REFLEXION LK CONTR 0010-22481
  • ASSY PAD CONDITIONER REFLEXION LK CMP 0010-54184W
  • ASSY PAD CONDITIONER REFLEXION LK CMP 0010-54184
  • ASSY PAD CONDITIONER REFLEXION LK CMP 0010-54184W
  • ASSY PAD CONDITIONER REFLEXION LK CMP 0010-54184
  • ASSY 0010-03151
  • ASSY 0010-77680
  • ASSY 0010-05004
  • ASSY 0100-77003
  • ASSY 0010-47749
  • ASSY 0010-37867
  • ASSY 0010-37866
  • ASSY 0010-04514
  • ASSY 0010-04514
  • ASSY 0010-05002
  • ASSY 0010-05002
  • ASSY 0010-05002
  • BL SUPER P6 AC SERVOMOTOR P60B18750RXS00M
  • BLOCK – MOTOR MOUNT – HEAD SWEEP 0020-14614
  • BLOCK MOTOR MOUNT HEAD SWEEP W/ SGMPH-04AAAP20 0020-14614
  • BLOCK MOTOR MOUNT HEAD SWEEP W/ SGMPH-04AAAP20 0020-14614
  • DC POWER SUPPLY 0010-45407
  • E-HD SIOC 1 GSBX FLX CMPL 02-361376-00
  • HEAT EXCHANGER PEL THERMO W/O CABLE ETN23-SC-A
  • ISRM MODULE ASSY 0010-46418
  • MKS PLUS 4-PORT 0190-24854
  • MOTOR ASSY 0190-77527
  • MOUNT ASSY-LH 0040-83362
  • ORION PELTHERMO 0190-10030
  • PCB CPU GESPAC 68030 0660-01815
  • PCB CPU GESPAC 68030 0660-01815
  • PCB LOWER PNEUMATIC CONTROLLER 0100-77017
  • PCB LOWER PNEUMATIC CONTROLLER 0100-77017
  • PCB 0660-00095
  • PELTHERMO ETN23A-SC-A
  • REFLEXION HVM PAD CONDITIONER II 0010-19624
  • REFLEXION HVM PAD CONDITIONER II 0010-19624
  • REFLEXION HVM PAD CONDITIONER II 0010-19624
  • REFLEXION HVM PAD CONDITIONER II 0010-19624
  • REFLEXION HVM PAD CONDITIONER II 0010-19624
  • REFLEXION PAD CONDITIONER ARM ASSEMBLY 0041-54447
  • ROTARY UNION ASSY 0190-16739
  • ROTARY UNION ASSY 0190-16739
  • ROTARY UNION ASSY 0190-16739
  • ROTARY UNION ASSY 0190-14417
  • SERVOPACK 0190-08005
  • SERVOPACK 0190-08005
  • SMC 2-PORT DEVICENET UPA MODULE INOI-7134-22
  • SMC 4-PORT DEVICENET UPA MODULE INOI-7134-21
  • SMC 4-PORT DEVICENET UPA MODULE INOI-7134-21
  • SMC 4-PORT DNET UPA MODULE A-SIDE 300MM INOI-7134-31-2
  • SPINDLE ASSY 0020-44857
  • VALVE 4-PORT UPA 300MM LK REFLEXION 0190-38324
  • VALVE 4-PORT UPA 300MM LK REFLEXION 0190-38324
Repair for popular brands such as Pfeiffer and Seiko Seiki 
  • TURBO PUMP SPLITFLOW 310 3P
  • TURBO PUMP SPLITFLOW 310
  • TURBO MOLECULAR PUMP TMU 071-003 P
  • TURBO PUMP TMU261
  • TURBOMOLECULAR PUMP W/ CONTROLLER SCU-301H STP-301H
Repair for PCB and related components for use in popular brands Applied Materials (AMAT), Varian, Lam Research, Novellus, Axcelis, KLA-Tencor, Tokyo Electron.
  • 16-SLOT PNEUMATIC MANIFOLD US31176 W/ CONTROLLER NP420-DN1 4060-00486
  • 300W SOLID STATE DRIVER BOARD ARX-X248
  • 750V POWER SUPPLY 3153110-001
  • ASSY PCB ANALOG I/O AIO BD 0100-00396
  • ASSY 0090-03902
  • ASSY 0100-37858
  • ASSY 0090-04266
  • MODIFICATION 0015-00356
  • MOTION ENGINEERING MEI XMP MOTION CONTROLLER 0190-24445
  • MOTOROLA PCB PCI MEZZANINE 605-099141-004 MVME 2604 712 I/O
  • PCB – CHAMBER SET INTERFACE BOARD 0015-00421
  • PCB – MAINFRAME INTERFACE BOARD 0100-00265
  • PCB  605-109114-001
  • PCB 16 IGS MOTHERBOARD 810-031325-105
  • PCB 16 IGS MOTHERBOARD 810-031325-105
  • PCB 16 IGS MOTHERBOARD 810-031325-105
  • PCB 300MM LOADLOCK INTERFACE 0100-00636
  • PCB ANALOG I/O BOARD ABX-X359
  • PCB ANALOG I/O BOARD 0100-20100
  • PCB ANALOG SYNC DETECT BOARD 0100-20066
  • PCB ASSEMBLY 0100-89005
  • PCB ASSEMBLY 0100-00308
  • PCB ASSEMBLY 0100-35564
  • PCB ASSEMBLY 0100-01185
  • PCB ASSEMBLY 0100-89006
  • PCB ASSY MAINFRAME SERIPLEX BACKPLANE 0100-00294
  • PCB ASSY MOTION CONTROL VS4 4 AXIS W/ENC 0190-03503
  • PCB ASSY POWER SUPPLY ESC BICEP HV-RP 810-495659-400
  • PCB ASSY UNIFORMITY CONTROLLER E15002240
  • PCB ASSY W/ SC8415M-B & SC8415M-A SVP551
  • PCB ASSY 0100-A5400
  • PCB ASSY 1426850
  • PCB ASSY 3381-000131-13
  • PCB ASSY 1-679-936-11
  • PCB ASSY 0190-09956
  • PCB ASSY 0100-76087
  • PCB ASSY 0100-76087
  • PCB ASSY 0100-01577
  • PCB ASSY 0190-43226
  • PCB ASSY ZT 4800
  • PCB ASSY E2B107-12/CPPC
  • PCB ASSY E208-000036-11
  • PCB ASSY 0100-A4390
  • PCB ASSY 7100-5209-01
  • PCB ASSY QPC351/1
  • PCB ASSY 0100-01973
  • PCB ASSY 0100-00502
  • PCB ASSY 0100-35564
  • PCB ASSY 0090-06373
  • PCB ASSY 0090-01809
  • PCB ASSY 0090-01809
  • PCB ASSY 0090-01810
  • PCB ASSY 0100-76133
  • PCB ASSY 0100-00427
  • PCB ASSY 01-W3884B17E
  • PCB ASSY 0100-01176
  • PCB ASSY 0190-00318
  • PCB ASSY 0190-00318
  • PCB ASSY 0100-01888
  • PCB ASSY 0190-12695
  • PCB ASSY 0100-76005
  • PCB ASSY 0100-00423
  • PCB ASSY 0100-70020
  • PCB ASSY 4022.436.8131
  • PCB ASSY 0190-09796
  • PCB ASSY 0100-01294
  • PCB ASSY 0100-20001
  • PCB ASSY 0100-20001
  • PCB ASSY 0100-09174
  • PCB ASSY 0090-75015
  • PCB ASSY 0100-01948
  • PCB ASSY 0100-76134
  • PCB ASSY 0100-01577
  • PCB CHAMBER SET INTERFACE BOARD (0110-02071) 0100-02071
  • PCB DOOR OPENER PROCESSOR W/ 77-4000-6110-03 I/O BD 4000-6109-03
  • PCB E2B023-12/ECUM E2B023/ECU
  • PCB HSDL-VLV-I/F BOARD WITH PLATE 2181-020069-15
  • PCB HSDL-VLV-I/F BOARD WITH PLATE 2181-020069-17
  • PCB HSDL-VLV-I/F VALVE CONTROL (2108-020069-11) 2181-020069-1
  • PCB I/O EXPANSION CARD 0130-76087 0090-00224
  • PCB JTS 810-073479-205
  • PCB LAMP FAILURE DETECTION BOARD 0100-35564
  • PCB LIQUID INJECTION GAS BOX INTERLOCK CVD 0100-20411
  • PCB LONWORKS 810-810480-102
  • PCB PANEL LATCH CPCI PYRO BOARD 30 0090-00911
  • PCB REACTIVE GAS INTERLOCK BD 0100-38000
  • PCB SERIPLEX CONTROL BUS MUXADIO SPX MUXADIO210 W/ 0100-00293 0090-00475
  • PCB SERIPLEX I/O DISTRIBUTION BOARD 0100-35231
  • PCB SINGLE BOARD COMPUTER MVME 167P-34SE
  • PCB SUBASSY E-101529100
  • PCB SYSTEM POWER DISTRIBUTION BOARD 0100-20036
  • PCB SYSTEM VIP3 770-933001-000
  • PCB VGA VIDEO CONTROLLER ASSY 0190-75084
  • PCB WAFER ORIENTER BD 0100-20069
  • PCB 810-031325-002
  • PCB 810-031325-002
  • PCB 0100-02338
  • PCB 810-495181-002
  • PCB 810-495585-001
  • PCB 0190-76167
  • PCB 810-077433-002
  • PCB 0090-08517
  • PCB 0102-57116
  • PCB 0090-91938
  • PCB 9090-00419
  • PCB BG4-5377
  • PCB 0660-01857
  • PCB 2104322-11
  • PCB 0190-16450
  • PCB ZT 5510
  • PCB ZT 5510
  • PCB ZT 5510
  • PCB SC2720-2-S
  • PCB 2L80-003321-11
  • PCB 0190-12218
  • PCB MB-IPC5-166
  • PCB 00000-2006-000-01
  • PCB 00000-2006-000-15
  • PCB 0101-57014
  • PCB 0100-02885
  • PCB 0135-0382
  • PCB 4000-6109-03
  • PCB 810-800961-009
  • PCB 1522300
  • PCB 2300780-A
  • PCB CEUB-0015
  • PCB 810-141736-005
  • PCB 810-017086-010
  • PCB 810-495585-003
  • PCB E6978-66492
  • PCB 0100-02464
  • PCB 0100-02121
  • PCB 0100-03028
  • PCB E3131-66511
  • PCB 0100-01720
  • PCB 03-134710-00
  • PCB 0190-11415
  • PCB 810-073479-005
  • PCB 810-073479-009
  • PCB 810-073479-306
  • PCB FA0062A
  • PCB VME-LTNI-S5
  • PCB 810-072903-014
  • PCB 0100-03522
  • PCB 0090-01810
  • PCB 0090-01810
  • PCB 0090-B3731
  • PCB E3131-69511
  • PCB TKB3500
  • PCB 01-W3893F02C
  • PCB 4S015-259
  • PCB 810-072687-524
  • PCB 0190-53178
  • PCB 23020202-B
  • PCB 0100-00422
  • PCB 1519520
  • PCB 702844-01
  • PCB 4S018-378
  • PCB 0100-35244
  • PCB 1522270
  • PCB 860214A01
  • PCB 0100-01764
  • PCB 545-5507
  • PCB E15000560
  • PCB VMIVME 7588
  • PCB 0190-09688
  • PCB 0100-35124
  • PCB 6900-1284-01
  • PCB 6ES5948-3UA13
  • PCB 0660-00095
  • PCB 605-109114-003
  • PCB 2L80-002677-41
  • PCB 605-064676-008
  • PCB 0190-28454
  • PCB 0190-28454
  • PCB 0190-76005
  • PCB 0190-76005
  • PCB 0190-01227
  • PCB EESC-0012
  • PCB 30299-083
  • PCB 101565004
  • PCB E15004820
  • PCB 0190-32547
  • PCB 880-12535-101
  • PCB 0100-03498
  • PCB SC2650-3-S
  • PCB 0100-02735
  • PCB 0660-00602
  • PCB MVME5500
  • PCB MVME5500
  • PCB MVME5500
  • PCB 0190-08390
  • PCB 0100-20069
  • PCB 0100-20069
  • PCB 0100-38033
  • PCB 0100-00018
  • PCB 2180-021108-11
  • PCB 0100-00022
  • PCBA ASSY 0190-76043
  • PCBA 0100-01652
  • PCBA 0100-01708
  • PCBVX2B SPEC CONTROL DRAWING INTELLIGENT MOTOR C 0190-09939
  • PCBVX2B SPEC CONTROL DRAWING INTELLIGENT MOTOR C 0190-09939
  • RADISYS PCB 0660-01857
  • RADISYS PCB 0660-01857
  • SERIPLEX I/O DISTRIBUTION W/ PCB CAGE 0020-34453 & BACKPLANE 0100-09286 0100-35124
  • SERIPLEX MUX I/O PCB(1) 0190-35653
  • SOLID STATE DRIVER BOARD ABX-X490
  • SPEC CONTROL DRAWING INTELLIGENT MOTOR C 0190-09939
  • WATLOW ANAFAZE PCB 778-900046-402

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