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CR1 Hitachi HS-9050 Dry Etch / Plasma Etcher
Condition:
Used
- Brand: Hitachi
- Condition: Used
(Parts are untested and sold as-is, without warranty or returns)
1 in stock
1 in stock
1 in stock
1 in stock
Description
Configuration
5CH + 2 cooling chambers
-Five Asher / Etch chambers
-Two Cooling chambers
-Integrated transfer modules
-Mini-Environment Wafer Loading Module (EFEM)
-The system is configured for Copper processing and has been used for Copper process.
HS-9050 Ashing Unit Items:
– Lambda Source Unit
– Capacitance Manometer (722B11TCD2FA) DG1
– RF Power Supply(AXG-5000II-27M-KE)
– Multiwavelength EPD 0.1s sampling (Spectrometer)
– MFC Configuration for Ashing Unit
– MFC#N N2 Max Flow 20 L/min (SEC-Z522MG XN)
– MFC#1(*) O02 MaxFlow20L/min (SEC-Z522MGXN)
– MFC#2 Ar Max Flow 20 L/min (SEC-Z522MG XN)
– MFC#3 H2 Max Flow 5 L/min (SEC-Z512MG x)
– MFC#4 N2 Max Flow 20 L/min (SEC-Z522MG XN)
– MFC#5(*) CF4 Max Flow 1 L/min (SEC-Z512MG xX)
– MFC#6 (**) CO2 Max Flow0.4L/min (SEC-Z512MGX)
– MFC#7 He Max Flow 20 L/min (SEC-Z522MG XN)
– MFC#S8: Without gasline, without MFC
– MFC#9: Without gasline, without MFC
– MFC#10: Without gasline, without MFC
Cooling Unit Items:
– Capacitance Manometer (722B11TCD2FA) DG1
– MFC Configuration for Cooling Unit A
– MFC#I N2 Max Flow 20 L/min (SEC-Z522MGXN)
– MFC#2 Without gasline, without MFC
– MFC#3 Without gasline, without MFC
– MFC#4 He Max Flow 10 L/min (SEC-Z512MGX)
Additional information
| Brand | Hitachi |
|---|---|
| Condition | Used |
Shipping Policy
We ship worldwide with end to end tracking via FedEx International Piority and DHL Express.
| Countries Delivery Time | |
|---|---|
USA  | 3-6 working days |
Taiwan  | 1-2 working days |
South Korea  | 1-2 working days |
Expedited Shipping
For all urgent orders, expedited shipping service is available at an additional charge. Kindly contact us before 2pm SGT for same day shipment.
*International customers are solely responsible for all duties, taxes (VAT) and insurance. Please check with your country\'s requirements before purchasing.
Refund Policy
*Return and Warranty depends on the condition of the item.
New: 14-day warranty, unless otherwise specified
Refurbished: 90-day warranty, unless otherwise specified
As-Is: No warranty and return
Warranty is voided if parts are subjected to improper testing, assembly, mishandling, misuse or if tamper stickers are broken.
For the remaining parts, as we do not have the expertise nor the testing equipment required to ensure that this part is in working condition, we are selling it on an \'As-Is\' condition with no warranty and returns, unless otherwise specified in the listing. Do feel free to contact us for more detailed images/information before making a purchase should you be unclear of the conditions of the listing.
Should you require the item to be in full working condition, kindly contact us and we can send the item for testing and refurbishing at an additional charge. Working parts come with a 90-day warranty.
Cancellation / Return / Exchange Policy
*Return and Warranty depends on the condition of the item.
New: 14-day warranty, unless otherwise specified
Refurbished: 90-day warranty, unless otherwise specified
As-Is: No warranty and return
Warranty is voided if parts are subjected to improper testing, assembly, mishandling, misuse or if tamper stickers are broken.
For the remaining parts, as we do not have the expertise nor the testing equipment required to ensure that this part is in working condition, we are selling it on an \'As-Is\' condition with no warranty and returns, unless otherwise specified in the listing. Do feel free to contact us for more detailed images/information before making a purchase should you be unclear of the conditions of the listing.
Should you require the item to be in full working condition, kindly contact us and we can send the item for testing and refurbishing at an additional charge. Working parts come with a 90-day warranty.
